Trooper-BI4 is a fully automated burn-in test handler which offers excellent performance for silicon carbide wafer reliability & burn-in testing in wafer-level. It allows 4 wafers to be burn-in at the same time with our precision active alignment gantry system to automate the handling of wafers from cassettes to the chucks. The handler can support wafer from 2” up to 12” and offers multiple probe tests reaching up to 1800 test channels per wafer with thermal chucks temperature that goes up to 200°C.
Input/ Output Option | Wafer Cassette Handling |
Channel Number | Up to 1800 per wafer unit (Subject to evaluation for higher channels) |
Wafer Size | 2, 3, 4, 5, 6, 8” |
Wafer Throughput Per 24 Hours | 38 wafers (based on 1800 die wafers and 2-hour burn-in per session) |
Burn-in Duration | Programmable |
Test Capabilities | Pre/Post Test (IGSS, IDSS, Vth, VSD) Stress Test (IGSS, IDSS) |