Wafer-Level Test
Trooper-CP-200HT
Wafer-Level Prober (6”, 8” wafers)
It offers a one-stop test solution to evaluate the characteristics of wafers, ensuring they meet stringent requirements by identifying eliminating early defects before advancing to the next manufacturing stage.
| Thin/Taiko Wafer | |
| 6”, 8” | |
| Wafer Cassette with EFEM Robot | |
| ±2 μm | |
| ±2 μm | |
| X/Y: 250 ms (for 10 mm) Z: 250 ms (for 0.5 mm) |
|
| Cable, Hard Docking | |
| -40°C to 200°C, with a precision of ±1°C | |
| Wafer Alignment, Probe Mark Inspection |
Trooper-CP-300HT
Wafer-Level Prober (8”, 12” wafers)
It offers a one-stop test solution to evaluate the characteristics of wafers, ensuring they meet stringent requirements by identifying eliminating early defects before advancing to the next manufacturing stage.
| Thin/Taiko Wafer | |
| 8”, 12” | |
| Wafer Cassette with EFEM Robot | |
| ±2 μm | |
| ±2 μm | |
| X/Y: 250 ms (for 10 mm) Z: 250 ms (for 0.5 mm) |
|
| Cable, Hard Docking | |
| -40°C to 150°C, with a precision of ±1°C | |
| Wafer Alignment, Probe Mark Inspection |